Refurbished Plasma Asher/Plasma Descum tools

Plasma Asher Stripper Descum

In semiconductor manufacturing plasma asher/stripper is the process of removing the photoresist from an etched wafer. Using a plasma source, a monatomic reactive species is generated. Oxygen or fluorine are the most common reactive species. The reactive species combines with the photoresist to form ashing which is removed with a vacuum pump.

Typically, monatomic (single atom) oxygen plasma is created by exposing oxygen gas (O2) to ionizing radiation. At the same time, many free radicals are formed which could damage the wafer. Newer, smaller circuitry is increasingly susceptible to these particles. Originally, plasma was generated in the process chamber, but as the need to get rid of free radicals has increased, many machines now use a downstream plasma configuration, where plasma is formed remotely and channeled to the wafer. This allows electrically charged particles time to recombine before they reach the wafer surface, and prevents damage to the wafer surface.

Monatomic oxygen is electrically neutral and although it does recombine during the channeling, it does so at a slower rate than the positively or negatively charged free radicals, which attract one another. Effectively, this means that when all of the free radicals have recombined, there is still a portion of the active species available for process. Because a large portion of the active specie is lost to recombination, process times may take longer. To some extent, these longer process times can be mitigated by increasing the temperature of the reaction area.

Allwin21 Corp can provide the following refurbished plasma asher/descum equipment.

• Refurbished Matrix 105
• Refurbished Matrix 205
• Refurbished Matrix 10
• Refurbished Gasonics Aura 1000
• Refurbished Gasonics Aura 2000
• Refurbished Gasonics Aura 3010
• Refurbished Gasonics L3510
• Refurbished Branson IPC 3000
• Refurbished Branson IPC L3200

Gasonics Aura 1000 Gasonics Aura 3010 Gasonics Aura 2000LL Gasonics L3510

Branson IPC L3200 Branson IPC 3000 Matrix 105 Matrix 10

Allwin21 Corp. can also provide Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished equipment which provides the following significant advantages